JPH058342B2 - - Google Patents

Info

Publication number
JPH058342B2
JPH058342B2 JP61152906A JP15290686A JPH058342B2 JP H058342 B2 JPH058342 B2 JP H058342B2 JP 61152906 A JP61152906 A JP 61152906A JP 15290686 A JP15290686 A JP 15290686A JP H058342 B2 JPH058342 B2 JP H058342B2
Authority
JP
Japan
Prior art keywords
vibration
foundation
air
room
proof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61152906A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314025A (ja
Inventor
Muneharu Fukuda
Hidenao Kawai
Kuma Murakami
Kazuo Yumoto
Tadahiro Oomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Engineering and Construction Co Ltd filed Critical Hitachi Plant Engineering and Construction Co Ltd
Priority to JP61152906A priority Critical patent/JPS6314025A/ja
Publication of JPS6314025A publication Critical patent/JPS6314025A/ja
Publication of JPH058342B2 publication Critical patent/JPH058342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
  • Ventilation (AREA)
JP61152906A 1986-06-30 1986-06-30 防振基礎構造 Granted JPS6314025A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61152906A JPS6314025A (ja) 1986-06-30 1986-06-30 防振基礎構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61152906A JPS6314025A (ja) 1986-06-30 1986-06-30 防振基礎構造

Publications (2)

Publication Number Publication Date
JPS6314025A JPS6314025A (ja) 1988-01-21
JPH058342B2 true JPH058342B2 (en]) 1993-02-01

Family

ID=15550722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61152906A Granted JPS6314025A (ja) 1986-06-30 1986-06-30 防振基礎構造

Country Status (1)

Country Link
JP (1) JPS6314025A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746870Y2 (ja) * 1990-03-29 1995-10-25 三機工業株式会社 クリーンルームにおける精密機器支持構造

Also Published As

Publication number Publication date
JPS6314025A (ja) 1988-01-21

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